A micromachined surface work-function gas sensor for low-pressure oxygen detection

Sensors and Actuators, B: Chemical

Volumn 42, Issue 3 B, 1997, Pages 195-204

  Bergstrom, Paul L ^a,b,c,d,e   Patel, Sanjay V ^b,f   Schwank, Johannes W ^b   Wise, Kensall D ^a,g,h,i  

^a University of Michigan   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c M S M350   (United States)

^d UNIVERSITY OF MINNESOTA   (United States)

^e MOTOROLA INC   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g PURDUE UNIVERSITY   (United States)

^h STANFORD UNIVERSITY   (United States)

ⁱ LUCENT TECHNOLOGIES   (United States)

Author keywords

Electrostatic actuation; Gas sensor; Kelvin probe; Micro hot plate; Micromechanical; Work function

Indexed keywords

CHEMICAL SENSORS; GAS SENSING ELECTRODES;

KELVIN PROBE; WORK FUNCTION;

OXYGEN SENSORS;

EID: 0031197444     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80336-X     Document Type: Article

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