Residual stress and various characteristics of Ti-N films coated by Ion Beam mixing technique

Zairyo/Journal of the Society of Materials Science, Japan

Volumn 46, Issue 8, 1997, Pages 933-938

  Miki, Yasuhiro ^a   Araki, Hiroji ^a   Taniguchi, Tadashi ^a   Nishibata, Yuji ^b   Yakushui, Masao ^b  

^a Nara Prefectural Institute of Industrial Technology   (Japan)

^b KANSAI UNIVERSITY   (Japan)

Author keywords

Ion beam mixing; Particle size; Residual stress; Ti N film; Wear characteristics

Indexed keywords

COATING TECHNIQUES; HARDNESS; RESIDUAL STRESSES; SUBSTRATES; TITANIUM COMPOUNDS; WEAR OF MATERIALS;

ION BEAM MIXING; TITANIUM NITRIDE FILM;

METALLIC FILMS;

EID: 0031197354     PISSN: 05145163     EISSN: None     Source Type: Journal    
DOI: 10.2472/jsms.46.933     Document Type: Article

References (20)

1. M. Kiuchi, K. Fujii, M. Sato and F. Fujimoto, Nucl. Instr. and Meth., B33, 649 (1988).
2. M. Kiuchi, K. Fujii, M. Sato and F. Fujimoto, Nucl. Instr. and Meth., B39, 166 (1989).
3. M. Kiuchi, K. Fujii, M. Sato, H. Miyamura, K. Kadono and F. Fujimoto, Nucl. Instr. and Meth., B37/38, 701 (1989).
4. H. P. Klug and L. E. Alexander, "X-ray Diff. Procedures." p.635 (1974) John Wiley & Sons.
5. Journal of Japan Society of Powder Metallurgy, 39, 163 (1992).
6. S. Nagakura, T. Kusunoki, F. Kakimoto and Y. Hirotsu, Appl. Cryst., 8, 65 (1975).
7. F. A. Doljack and R. W. Hoffmann, Thin Solid Films, 12, 71 (1972).
8. R. W. Hoffmann, Thin Solid Films, 34, 185 (1976).
9. J. -E. Sundgren, B. -O. Johansson, S. -E. Karlsson and H. T. G. Hentzell, Thin Solid Films, 105, 367 (1983).
10. John A. Thornton, J. Vac. Sci. Technol., 12, 830 (1975).