Chemical bevelling of InP-based structures by HBr-H3PO4-K2Cr2O7 solution

Journal of Crystal Growth

Volumn 179, Issue 1-2, 1997, Pages 320-323

  Srnanek, R ^a   Gomati, M El ^b   Novotny, I ^a   Pudis, D ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b UNIVERSITY OF YORK   (United Kingdom)

Author keywords

Bevel; Chemical etching; InGaAlAs; InGaAs; InGaAsP; InP

Indexed keywords

CHROMIUM COMPOUNDS; ETCHING; HETEROJUNCTIONS; INORGANIC ACIDS; SEMICONDUCTING INTERMETALLICS; SOLUTIONS;

BEVELS; CHEMICAL BEVELLING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0031195471     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00176-0     Document Type: Article

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