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Volumn 8, Issue 7, 1997, Pages 798-803
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Control of hot-filament ionization gauge emission current: Mathematical model and model-based controller
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENT CONTROL;
ELECTRON EMISSION;
IONIZATION OF SOLIDS;
MATHEMATICAL MODELS;
HOT FILAMENT IONIZATION GAUGE EMISSION CURRENT;
GAGES;
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EID: 0031193132
PISSN: 09570233
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-0233/8/7/016 Document Type: Article |
Times cited : (23)
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References (12)
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