Effects of multi-stepped negative biasing on microcrystalline diamond film formation with combustion-flame method

Journal of Crystal Growth

Volumn 178, Issue 3, 1997, Pages 315-320

  Abe, Toshimi ^a   Suemitsu, Maki ^b   Miyamoto, Nobuo ^c  

^a TOHOKU INSTITUTE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMBUSTION; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; DEPOSITION; FILM GROWTH; GRAPHITE; SEMICONDUCTOR GROWTH; SUBSTRATES;

COMBUSTION FLAME METHOD; DIAMOND FILM FORMATION;

DIAMOND FILMS;

EID: 0031191594     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00907-4     Document Type: Article

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