Plasma charging damage and water-related hot-carrier reliability in the deposition of plasma-enhanced tetraethylorthosilicate oxide

Journal of the Electrochemical Society

Volumn 144, Issue 7, 1997, Pages 2525-2530

  Lin, Y M ^a   Jang, S M ^a   Yu, C H ^a   Lei, T F ^a   Chen, J Y ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; HOT CARRIERS; INTERMETALLICS; MOISTURE; ORGANOMETALLICS; OXIDES; OZONE; PLASMA APPLICATIONS; SATURATION (MATERIALS COMPOSITION);

INTERMETALLIC DIELECTRICS (IMD); PLASMA CHARGING DAMAGE; PLASMA ENHANCED TETRAETHYLORTHOSILICATE OXIDE (PETEOS);

DIELECTRIC FILMS;

EID: 0031191304     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837849     Document Type: Article

References (21)