Optical coating inspection of pharmaceutical tablets by diffractive element

Measurement Science and Technology

Volumn 8, Issue 7, 1997, Pages 815-818

  Peiponen, K E ^a   Silvennoinen, R ^a   Rasanen J ^b   Matsuda, K ^b   Tanninen, V P ^c  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c ORION CORPORATION   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; HOLOGRAMS; INSPECTION; OPTICAL COATINGS; SENSORS;

DIFFRACTIVE ELEMENTS;

DRUG PRODUCTS;

EID: 0031191221     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/8/7/018     Document Type: Article

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