An XRD study of highly textured HfN films

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 286-293

  Hwang, Bing H ^a   Chiou, S Y ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Nitrides; Sputtering; Stress; X ray diffraction

Indexed keywords

ANISOTROPY; DEPOSITION; ELASTICITY; FILMS; MAGNETRON SPUTTERING; RESIDUAL STRESSES; STAINLESS STEEL; STRAIN; SUBSTRATES; TEXTURES; TOOL STEEL; X RAY DIFFRACTION ANALYSIS;

HAFNIUM NITRIDE; WILLIAMSON HALL METHOD;

NITRIDES;

EID: 0031189954     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00106-5     Document Type: Article

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