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Volumn 36, Issue 21, 1997, Pages 5109-5121
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Thin-film optical sensors with silicon-compatible materials
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALLINE MATERIALS;
DIELECTRIC MATERIALS;
LIGHT ABSORPTION;
NUMERICAL METHODS;
OPTICAL VARIABLES MEASUREMENT;
PHOTODETECTORS;
PHOTODIODES;
REFRACTIVE INDEX;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICON NITRIDE;
THIN FILMS;
ANTIREFLECTION FILTERS;
COLOR SENSOR;
INTERFERENCE FILTER;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYSILICON PHOTODIODES;
THIN FILM OPTICAL SENSORS;
OPTICAL SENSORS;
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EID: 0031189937
PISSN: 11101903
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (21)
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