He+ beam induced damage of silicon carbide studied by vibrational spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 129, Issue 2, 1997, Pages 244-249

  Hobert, H ^a   Dunken, H ^a   Seifert, F ^a   Menzel, R ^a   Bachmann, T ^a   Wesch, W ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; HELIUM; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); LATTICE VIBRATIONS; RADIATION DAMAGE; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; THIN FILMS;

LATTICE DISTORTIONS;

SILICON CARBIDE;

EID: 0031189795     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00205-X     Document Type: Article

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