Three-dimensional morphological instabilities in chemical vapor deposition films

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 371-380

  Hwang, Chi Chuan ^a   Yang, Hwei Yen ^b   Hsieh, Jin Yuan ^b   Dai, Yuan Mon ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b NANYA INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Chemical vapor deposition (CVD); Diffusion; Surface diffusion; Surface morphology

Indexed keywords

BOUNDARY CONDITIONS; CHEMICAL VAPOR DEPOSITION; DIFFUSION IN SOLIDS; FILM GROWTH; MATHEMATICAL MODELS; MORPHOLOGY;

THREE DIMENSIONAL MORPHOLOGICAL INSTABILITY;

THIN FILMS;

EID: 0031189561     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00192-2     Document Type: Article

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