Effects of a titanium interlayer on the formation of platinum suicides

Thin Solid Films

Volumn 303, Issue 1-2, 1997, Pages 232-237

  Lee, Chong Kuang ^a   Hsieh, Chia Dar ^a   Tseng, Bae Heng ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Depth profiling; Electron microscopy; Suicides; X ray diffraction

Indexed keywords

ELECTRON MICROSCOPY; INTERFACES (MATERIALS); PLATINUM ALLOYS; SILICON WAFERS; SOLID SOLUTIONS; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM; TITANIUM OXIDES; X RAY DIFFRACTION ANALYSIS;

DEPTH PROFILING; PLATINUM SILICIDES;

SEMICONDUCTING FILMS;

EID: 0031189520     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09605-8     Document Type: Article

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