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Volumn 144, Issue 7, 1997, Pages 2548-2551
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Phosphorus pileup and sublimation at the silicon surface
a
a
NTT CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ETCHING;
HYDROFLUORIC ACID;
ION IMPLANTATION;
NITROGEN;
PHOSPHORUS;
SUBLIMATION;
PIRANHA CLEANED WAFERS;
SILICON WAFERS;
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EID: 0031188652
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1837853 Document Type: Article |
Times cited : (10)
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References (12)
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