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Volumn 144, Issue 7, 1997, Pages 2548-2551

Phosphorus pileup and sublimation at the silicon surface

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ETCHING; HYDROFLUORIC ACID; ION IMPLANTATION; NITROGEN; PHOSPHORUS; SUBLIMATION;

EID: 0031188652     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837853     Document Type: Article
Times cited : (10)

References (12)
  • 7
    • 4043129911 scopus 로고    scopus 로고
    • Canon Sales Co., Private communication
    • Canon Sales Co., Private communication.
  • 10
    • 0345944815 scopus 로고    scopus 로고
    • G. R. Srinivasan, C. S. Murthy, and S. T. Dunham, Editors, PV 94-6, The Electrochemical Society Proceedings Series, Pennington, NJ
    • P. B. Griffin and J. D. Plummer, in Process Physics and Modeling in Semiconductor Technology, G. R. Srinivasan, C. S. Murthy, and S. T. Dunham, Editors, PV 94-6, p. 101, The Electrochemical Society Proceedings Series, Pennington, NJ (1996).
    • (1996) Process Physics and Modeling in Semiconductor Technology , pp. 101
    • Griffin, P.B.1    Plummer, J.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.