The effects of mechanical properties of thin films on nano-indentation data: Finite element analysis

Computational Materials Science

Volumn 8, Issue 3, 1997, Pages 273-281

  Gan, L ^a   Ben Nissan, B ^a  

^a UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

Finite element analysis; Hardness; Indentation; Strain hardening; Thin films; Yield strength; Young's modulus

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; HARDNESS TESTING; MECHANICAL PROPERTIES; STRAIN HARDENING; YIELD STRESS;

THIN FILMS;

EID: 0031188521     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0927-0256(97)00040-2     Document Type: Article

References (33)

1. C.M. Perrott, Wear 45 (1977) 293.
2. S.S. Chiang, D.B. Marshall, A.G. Evans, J. Appl. Phys. 53 (1) (1982) 298.
3. H. Gao, C. Chiu, J. Lee, Int. J. Solids Struct. 29 (20) (1992) 2471.
4. H.F. Wang, H. Bangert, Mater. Sci. Eng. A 163 (1993) 43.
5. Y. Murakami, K. Matsuda, J. Appl. Mech. Trans. ASME 61 (1994) 822.
6. X. Cai, H. Bangert, Thin Solid Films 264 (1) (1995) 59.
7. J.P. Blanchard, J. Appl. Mech. Trans. ASME 61 (2) (1994) 480.
8. J.M. Olaf, E. Sommer, Exp. Mech. 33 (3) (1993) 201.
9. J.M. Olaf, E. Scheer, Comput. Mater. Sci. 1 (1993) 276.
10. A.K. Bhattacharya, W.D. Nix, Int. J. Solids Struct. 27 (8) (1991) 1047.
11. A.K. Bhattacharya, W.D. Nix, Int. J. Solids Struct. 24 (12) (1988) 1287.
12. A. Bolshakov, W.C. Oliver, G.M. Pharr, J. Mater. Res. 11 (3) (1996) 760.
13. T.A. Laursen, J.C. Simo, J. Mater. Res. 7 (3) (1992) 618.
14. K.R. Jayadevan, R. Narasimhan, Comput. Struct. 57 (5) (1995) 915.
15. M.V. Swain, J. Mencik, Thin Solid Films 253 (1994) 204.
16. J.S. Field, M.V. Swain, J. Mater. Res. 8 (2) (1993) 297.
17. E.R. Weppelmann, J.S. Field, M.V. Swain, J. Mater. Sci. 30 (1995) 2455.
18. J.S. Field, M.V. Swain, J. Mater. Res. 10 (1) (1995) 101.
19. A. Jamting, B. Ben-Nissan, I. Ashcroft, M.V. Swain, J.M. Bell, Thin films: Stresses and mechanical properties, in: S.P. Baker, C. Ross, P.H. Townsend, C.A. Volkert, P. Borgesen (Eds.), Mat. Res. Soc. Symp. Proc., vol. 356, 1995, p. 711.
20. E.R. Weppelmann, J.S. Field, M.V. Swain, J. Mater. Res. 8 (4) (1993) 830.
21. H. Djabella, R.D. Amell, Thin Solid Films 213 (1992) 205.
22. L. Gan, B. Ben-Nissan, A. Ben-David, Thin Solid Films 290/291 (1996) 362.
23. K. Komvopoulos, ASME J. Tri. 110 (1988) 477.
24. K. Komvopoulos, ASME J. Tri. 111 (1989) 430.
25. E.R. Kral, K. Komvopoulos, D.B. Bogy, ASME J. Appl. Mech 60 (1993) 829.
26. E.R. Kral, K. Komvopoulos, D.B. Bogy, ASME J. Appl. Mech. 62 (1995) 20.
27. E.R. Kral, K. Komvopoulos, D.B. Bogy, ASME J. Appl. Mech. 62 (1995) 29.
28. P. Montmitonnet, M.L. Edlinger, E. Felder, ASME J. Tri. 115 (1993) 15.
29. B.D. Fabes, W.C. Oliver, R.A. McKee, F.J. Walker, J. Mater. Res. 7 (11) (1992) 3056.
30. Y.-M. Chen, A.W. Ruff, J.W. Dally, J. Mater. Res. 9 (5) (1994) 1314.
31. K. Zeng, E. Soderlund, A.E. Giannakopoulos, D.J. Rowcliffe, Acta Mater. 44 (3) (1996) 1127.
32. Hibbitt, Karlsson and Sorensen, Inc., Abaqus/Standard, User's Manual, RI USA 1994.
33. W.F. Chen, H. Zhang, Structural Plasticity: Theory, Problems, Springer-Verlag, New York, 1991, pp. 5-6.