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Volumn 303, Issue 1-2, 1997, Pages 269-272
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Investigation of amorphous silicon compensated materials over a wide range of dopant concentrations
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Author keywords
Amorphous materials; Compensation; Defect kinetics
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Indexed keywords
AMORPHOUS SILICON;
COMPOSITION EFFECTS;
DEFECTS;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY OF SOLIDS;
FILM GROWTH;
PHOTOCONDUCTIVITY;
PHOTOSENSITIVITY;
SILANES;
DEFECT KINETICS;
DIBORANE;
PHOSPHINE;
AMORPHOUS FILMS;
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EID: 0031187754
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00067-9 Document Type: Article |
Times cited : (9)
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References (16)
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