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Volumn 304, Issue 1-2, 1997, Pages 278-285
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Interdiffusion in CoN/CN soft X-ray multilayer mirrors
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Author keywords
Doping; Interdiffusivity; Multilayers; Soft X ray
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Indexed keywords
ACTIVATION ENERGY;
AMORPHOUS MATERIALS;
ANNEALING;
CARBON INORGANIC COMPOUNDS;
COBALT COMPOUNDS;
DOPING (ADDITIVES);
INTERDIFFUSION (SOLIDS);
MULTILAYERS;
NITRIDES;
THERMODYNAMIC STABILITY;
CARBON NITRIDE;
COBALT NITRIDE;
SOFT X RAY MULTILAYER MIRRORS;
MIRRORS;
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EID: 0031187450
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00150-8 Document Type: Article |
Times cited : (14)
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References (19)
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