Orientation dependence of the oxidation of SiC surfaces

Physica Status Solidi (A) Applied Research

Volumn 162, Issue 1, 1997, Pages 299-304

  Ueno, K ^a  

^a FUJI ELECTRIC CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CRYSTAL ORIENTATION; SEMICONDUCTING SILICON COMPOUNDS; THERMOOXIDATION;

BIRD'S BEAK LENGTH; STERIC HINDRANCE;

SILICON CARBIDE;

EID: 0031186814     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(199707)162:1<299::AID-PSSA299>3.0.CO;2-X     Document Type: Article

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