|
Volumn 30, Issue 14, 1997, Pages 2026-2032
|
Optical emission spectroscopy of electrical focii discharges
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
ALUMINUM;
CONTAMINATION;
COPPER;
ELECTRIC BREAKDOWN OF GASES;
ELECTRODES;
EMISSION SPECTROSCOPY;
LIGHT EMISSION;
MAGNETOPLASMA;
PINCH EFFECT;
PLASMA DENSITY;
PLASMA SHEATHS;
SILICON;
ELECTRICAL FOCII DISCHARGES;
OPTICAL EMISSION SPECTROSCOPY;
ELECTRIC DISCHARGES;
|
EID: 0031186579
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/30/14/010 Document Type: Article |
Times cited : (11)
|
References (15)
|