Measurement of the strength of CVD diamond thin plates

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 63, Issue 7, 1997, Pages 1054-1058

  Hirata, Atsushi ^a   Oshinomi, Tatusya ^a   Yamashita, Satoshi ^a   Kanda, Kazutaka ^a   Yoshikawa, Masanori ^a  

^a NONE

Author keywords

Arc discharge plasma jet CVD; Bending strength; CVD; CVD diamond; DC plasma CVD; RF plasma; Thin plate

Indexed keywords

BENDING STRENGTH; CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; LASER BEAM CUTTING; MECHANICAL VARIABLES MEASUREMENT; PLASMA JETS; THIN FILMS;

ARC DISCHARGE PLASMA JETS; FREE STANDING CHEMICAL VAPOR DEPOSITED DIAMOND THIN PLATES;

DIAMOND FILMS;

EID: 0031186225     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.63.1054     Document Type: Article

References (9)

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