X-ray photon and thermal effects on trimethylsilane covered Si(100) surfaces

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 160-165

  Wang, P W ^a   Sulak, J ^a   Bater, S ^a   Zhang, L P ^a   Craig Jr , J H ^a  

^a UNIVERSITY OF TEXAS AT EL PASO   (United States)

Author keywords

Thermal effects; X ray photon

Indexed keywords

ADSORPTION; CHEMICAL BONDS; ELECTRON ENERGY LEVELS; PHOTONS; SILANES; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

TRIMETHYLSILANE;

SILICON;

EID: 0031186174     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00191-0     Document Type: Article

References (22)

1. M.P. Delplancke, J.M. Vandentop, G.A. Somorjai, Thin Solid Films 202 (1991) 289.
2. M.V. Ascherl, J.H. Campbell, J.H. Craig Jr., Appl. Surf. Sci. 74 (1994) 121.
3. J.H. Campbell, M.V. Ascherl, J.H. Craig Jr., J. Vac. Sci. Technol. A12 (1994) 2128.
4. P.W. Wang, S. Bater, L.P. Zhang, M. Ascherl, J.H. Craig Jr., Appl. Surf. Sci. 90 (1995) 413.
5. C.D. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder, and G.E. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Corp., Eden Prairie, MN, 1979, p. 52.
6. G.M. Renlund, S. Prochazka, R.H. Doremus, J. Mater. Res. 6 (1991) 2723.
7. Y. Mizokawa, K.M. Geib and C.W. Wilmsen, J. Vac. Sci. Technol. A4, 1986.
8. M.V. Ascherl, J.H. Campbell, J. Lozano, J.H. Craig Jr., J. Vac. Sci. Technol. A13 (1995) 2721.
9. F. Lee, A.L. Backman, R. Lin, T.R. Gow, R.I. Masel, Surf. Sci. 213 (1989) 173.
10. R. Lin, R.I. Masel, Surf. Sci. 258 (1991) 225.
11. D.R. Lide (Ed.), CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, FL, 1991, 9-106 and 9-108.
12. R.I.G. Uhrberg, G.V. Hansson, J.M. Nicholls, S.A. Flodstrom, Phys. Rev. B 24 (1981) 1484.
13. K. Oura, Hanawa, Surf. Sci. 82 (1979) 202.
14. T. Ichikawa, S. Ino, Surf. Sci. 85 (1979) 221.
15. G.E. Becker, J.C. Bean, J. Appl. Phys. 48 (1977) 3398.
16. M. Handbucken, H. Neddermeyer, J.A. Venables, Surf. Sci. Lett. 137 (1984) L92.
17. Ph. Avouris, F. Bozso, R.J. Hamers, J. Vac. Sci. Technol. B5 (1987) 1387.
18. S.M. Cherif, J.P. Lacharme, C.A. Sebenne, Appl. Surf. Sci. 56-58 (1992) 777.
19. M. von Allmen, Laser and Electron Beam Processing of Materials, in: C.W. White and P.S. Peercy (Eds.), Academic Press, New York, 1980, 6.
20. R.C. Weast and M.J. Astle (Eds.), CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, FL, 1981, E-146.
21. M.P. Seah, W.A. Dench, Surf. Interf. Ana. 1 (1979) 2.
22. J.J. Bozzola and L.D. Russell, Electron Microscopy, Jones and Bartlett Pub., Boston, 1992, 332.