Photosensor and optical waveguide coupling in silicon technology

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 524-528

  Moreno, Mauricio ^a   Domínguez, Carlos ^b   Muñoz, Javier ^b   Calderer, Josep ^c   Morante, Joan Ramon ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

CMOS technology; Photodetectors; Silicon; Waveguides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; PHOTODETECTORS; PHOTODIODES; REACTIVE ION ETCHING; SILICA; SILICON NITRIDE; SUBSTRATES;

OPTICAL SIGNAL ATTENUATION;

OPTICAL SENSORS;

EID: 0031177093     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01538-0     Document Type: Article

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