Considerations regarding the Statistics of Particle Counting

Journal of the IEST

Volumn 40, Issue 4, 1997, Pages 29-33

  Bzik, Thomas J ^a  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

Author keywords

FED STD 209E; ISO TC 209; Particle counting; Standards; Statistical quality control; Statistics; Ultraclean environments

Indexed keywords

IMPURITIES; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS; CONTAMINATION; PARTICLES (PARTICULATE MATTER); QUALITY CONTROL; STANDARDS; STATISTICAL PROCESS CONTROL;

PARTICLE COUNTING; STATISTICAL QUALITY CONTROL;

PARTICLES (PARTICULATE MATTER); POLLUTION CONTROL;

EID: 0031176011     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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