Modified fourier transform profilometry for the measurement of 3-D steep shapes

Optics and Lasers in Engineering

Volumn 27, Issue 5, 1997, Pages 493-505

  Yi, Jiang ^a   Huang, Shanglian ^a  

^a CHONGQING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FOURIER TRANSFORMS; OPTICAL VARIABLES MEASUREMENT;

MODIFIED FOURIER TRANSFORM PROFILOMETRY (MFTP); STEEP OBJECT SHAPE MEASUREMENT;

FOURIER OPTICS;

EID: 0031175859     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(96)00042-5     Document Type: Article

References (8)

1. Takeda, M. & Mutoh, K., Fourier transform profilometry for the automatic measurement of 3-D object shapes. Appl. Opt., 22 (1983) 3977-82.
2. Li, J., Su, X.-Y. & Guo, L.-R., Improved Fourier-transform profilometry for automatic measurement of three-dimension object shapes. Opt. Engng, 29 (1990) 1439-33.
3. Wyant, J. C. & Creath, K., Recent advances in interferometric optical testing. Laser Focus/Electro-Opt., Nov. 1985, 118-32.
4. Carre, P., Installation et utilisation du comparateur photoelectrique et interferentiel du Bureau International des Poids et Mesures, Metrologia. Vol. 2, 1966, pp. 13-23.
5. Schweider, J., Burow, R., Elssner, K.-E., Grzanna, J., Spolaczyk, R. & Merkel, K., Digital wave-front measuring interferometry: some systematic error source. Appl. Opt., 22 (1983) 3421-32.
6. Takeda, M., Ina, H. & Kobayashi, S., Fourier-transform method of fringe pattern analysis for computer-based topography and interferometry. J. Opt. Soc. Am., 72 (1982) 156-60.
7. Chen, Z.-X. & Su, X.-Y., 3-D object shapes measurement system by quasi-sine modulating optical field. Chin. J. Sci. Instrum., 10(4) (1989) 409-15 (in Chinese).
8. Srinivasan, V., Liu, H. C. & Halioua, M., Automated phase-measuring profilometry of 3-D diffuse object. Appl. Opt. 23 (1984) 3105-8.