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Volumn 36, Issue 6 A, 1997, Pages

Cobalt thin films prepared by chemical vapor deposition from cobalt acetylacetonates

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COBALT; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY CRYSTALLOGRAPHY;

EID: 0031170471     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l705     Document Type: Article
Times cited : (23)

References (3)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.