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Volumn 36, Issue 6 A, 1997, Pages
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Cobalt thin films prepared by chemical vapor deposition from cobalt acetylacetonates
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COBALT;
ELECTRIC CONDUCTIVITY OF SOLIDS;
FILM PREPARATION;
SCANNING ELECTRON MICROSCOPY;
THIN FILMS;
X RAY CRYSTALLOGRAPHY;
COBALT ACETYLACETONATES;
ISLAND STRUCTURES;
METALLIC FILMS;
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EID: 0031170471
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.l705 Document Type: Article |
Times cited : (23)
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References (3)
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