Energy-resolved mass spectra of ions and neutrals in triode ion plating of Ti(C,N) coatings

Surface and Coatings Technology

Volumn 92, Issue 1-2, 1997, Pages 56-61

  Wouters, S ^a   Kadlec, S ^b   Quaeyhaegens, C ^a   Stals, L M ^a  

^a HASSELT UNIVERSITY   (Belgium)

^b Katholieke Hogeschool voor Limburg   (Belgium)

Author keywords

Energy resolved mass spectra; Ti(C,N) coatings; Triode ion plating

Indexed keywords

ELECTRON BEAMS; LATTICE CONSTANTS; MASS SPECTROMETRY; PRESSURE EFFECTS; RESIDUAL STRESSES; TITANIUM CARBIDE; TITANIUM NITRIDE; TRIODES; X RAY DIFFRACTION ANALYSIS;

ENERGY RESOLVED MASS SPECTROMETRY; TRIODE ION PLATING;

CERAMIC COATINGS;

EID: 0031169789     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03136-2     Document Type: Article

References (23)

1. H.M. Gabriel and K.H. Kloos, Thin Solid Films, 118 (1984) 243.
2. H. Holleck, J. Vac. Sci. Technol. A, 4 (1986) 2661.
3. W.D. Sproul, J. Vac. Sci. Technol. A, 12 (1994) 1595.
4. H. Kajioka, K. Higuchi and Y. Kawashimo, Thin Solid Films, 228 (1993) 280.
5. P. Hedenqvist, M. Olsson and S. Hogmark, Surf. Eng., 8(1) (1992) 39.
6. O. Knotek, F. Löffler and G. Krämer, Surf. Coat. Technol., 61 (1993) 320.
7. B.E. Jacobson, Thin Solid Films, 118 (1984) 285.
8. P.A. Steinmann and H.E. Hintermann, J. Vac. Sci. Technol. A, 3 (1985) 2394.
9. M. Tamura and K. Fukuda, ISIJ Int., 33 (1993) 949.
10. K. Aigner, W. Legnauer, D. Rafaja and P. Ettmayer, J. Alloys Compounds, 215 (1994) 121.
11. J.M. Schneider, A. Voevodin, C. Rebholz, A. Matthews, J.H.C. Hogg, D.B. Lewis and M. Ives, Surf. Coat. Technol., 74/75 (1995) 312.
12. K.-T. Rie, A. Gebauer, J. Wohle, H.K. Tonshoff and C. Blawit, Surf. Coat. Technol., 74/75 (1995) 375.
13. G. Baravian, G. Sultan, E. Damond, H. Detour, C. Hayaud and P. Jacquot, Surf. Coat. Technol., 77(1-3) (1995) 687.
14. S. Munsterer and K. Kohlhof, Surf. Coat. Technol., 74/75 (1995) 642.
15. K. Narasimhan, S.P. Boppana and D.G. Bhat, Wear, 188 (1995) 123.
16. A.A. Voevodin, C. Rebholz, J.M. Schneider, P. Stevenson and A. Matthews, Surf. Coat. Technol., 73 (1995) 185.
17. M. Nesládek, C. Quaeyhaegens, S. Wouters, L.M. Stals, E. Bergmann and G. Rettinghaus, Surf. Coat. Technol., 68/69 (1994) 339.
18. S. Wouters, S. Kadlec, M. Nesládek, C. Quaeyhaegens and L.M. Stals, Surf. Coat. Technol., 76 (1995) 135.
19. C. Quaeyhaegens, G. Knuyt and L. Stals, J. Vac. Sci. Technol. A, 14(4) (1996) 2462.
20. L. De Buyser, P. Van Houtte and E. Aernoudt, Textures Microstructures, 14/18 (1991) 73.
21. K.S. Fancey, C.A. Porter and Matthews, J. Vac. Sci. Technol. A, 13(2) (1995) 428.
22. C.A. Davis, Thin Solid Films, 226 (1993) 30.
23. J. Musil, V. Poulek, S. Kadlec and J. Vyskocil, Nucl. Instrum. Meth. Phys. Res., B 37/38 (1989) 897.