Technique for fabricating tungsten thin film sensors with tc ≤ 100 mk on germanium and silicon substrates

IEEE Transactions on Applied Superconductivity

Volumn 7, Issue 2 PART 3, 1997, Pages 3367-3370

  Young, B A ^a   Nam, S W ^a   Brink, P L ^a   Cabrera, B ^a   Chugg, B ^a   Clarke, R M ^a   Davies, A K ^a   Irwin, K D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CRYOGENICS; DEPOSITION; GERMANIUM; METALLIC FILMS; PHONONS; SENSORS; SILICON; SUBSTRATES; TUNGSTEN;

TUNGSTEN SENSORS;

SUPERCONDUCTING FILMS;

EID: 0031169779     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.622094     Document Type: Article

References (7)

1. S.W. Namer. al "SQUID based W-Al quasiparticle trapping assisted transition edge sensor" Nucl. Instrum. Meth. vol. A370 pp. 187-189 (1996); T. Shutt et. al. Phys. Rev. Lett. vol. 69 p. 3452 (1992); ibid.p. 3531.
2. Proceedings of the Sixth International Workshop on Low Temperature Detectors (LTD6) Beatenberg/Interlaken Switzerland 28Aug-lSept 1995 Nucl. Instr. Meth. vol. A370 No. 1 (1996).
3. K.D. Irwin "Appl. Phys. Lett. vol. 66 p. 1998 (1995) K.D. Irwin et. ai "A quasiparticle-trap-assisted transition-edge sensor for phonon-mediated particle detection" Rev. Sei. Instrum. vol. 66 pp. 5322-5326 (1995). K.D. Irwin Ph.D. thesis Stanford University (1995).
4. S.W. Nam et. al Nucl. Intrum. Meth. vol. A370 p. 187 (1996); B. Cabrera et. al "Advances in Stanford phonon-mediated elementary particle detectors" Physica B vol. 219&220 pp. 744-747 (1996).
5. T. Shutt et. al "Recent Results with a 62 g Ge Cryogenic Dark Matter Detector" Nucl. Instr. Meth. vol. A370 No. 1 pp. 165-167 (1996).
6. P.D. Barnes Jr. et. ai "Installation of the Cryogenic Dark Matter Search (CDMS)" Nucl. Instr. Meth. vol. A370 No. 1 pp. 233-236 (1996).
7. S.W. Nam et. al "SQUID- Based W-A1 QuasiparticleTrap Assisted Superconducting Transition Edge Sensor with Position Resolution" these proceedings.