Preparation of semiconductive SrTiO3 thin films by metal-organic chemical vapor deposition and their electrical properties

Journal of Materials Research

Volumn 12, Issue 6, 1997, Pages 1655-1660

  Nagano, Daisuke ^a   Funakubo, Hiroshi ^a   Sakurai, Osamu ^a   Shinozaki, Kazuo ^a   Mizutani, Nobuyasu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPOSITION EFFECTS; COOLING; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM PREPARATION; HEAT TREATMENT; METALLORGANIC CHEMICAL VAPOR DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

STRONTIUM TITANATE;

SEMICONDUCTING FILMS;

EID: 0031169245     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0226     Document Type: Article

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