Minimising carbon contamination during ion beam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 129, Issue 1, 1997, Pages 130-136

  Healy, M J F ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CARBON; DEPOSITION; HYDROCARBONS; IMPURITIES; NUCLEAR PHYSICS; SILICON;

CARBON CONTAMINATION; NUCLEAR REACTION ANALYSIS; RESIDUAL GAS;

ION BEAMS;

EID: 0031168117     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00127-4     Document Type: Article

References (8)

1. G. Blondiaux, G. Ducouret, B. Hakim, C. Perrin, J.L. Debrun, Transact. Am. Nucl. Soc, 62 (1990) 202.
2. B. Maurel, G. Amsel, J.P. Nadai, Nucl. Instr. and Meth. 197 (1982) 1.
3. N.J. Chou, T.H. Zabel, J. Kim, J.J. Ritsko, Nucl. Instr. and Meth. B 45 (1990) 86.
4. G. Debras, G. Deconninck, J. Radioanal. Chem. 38 (1977) 193.
5. J.P. Biersack and J.F. Ziegler, TRIM95 (IBM Research, Yorktown, NY, 1995).
6. D.W. Lane, A.J. Avery, G. Partridge, M. Healy, Nucl. Instr. and Meth. B 73 (1993) 583.
7. T.A. Heppell, Vacuum 37 (1987) 593.
8. C. Te-Chang, S.U. Campisano and A. Trovato, Radiat. Eff. Lett. 76 (1983) 131.