A new large volume PVD coating system using advanced controlled arc and combined arc/unbalanced magnetron (ABS™) deposition techniques

Surface and Coatings Technology

Volumn 92, Issue 1-2, 1997, Pages 62-68

  Hurkmans, T ^a   Hauzer, F ^a   Buil, B ^a   Engel, K ^a   Tietema, R ^a  

^a Hauzer Techno Coating BV   (Netherlands)

Author keywords

Arc evaporation; Decorative coatings; Magnetron sputtering; Tribological coatings

Indexed keywords

CATHODES; ELECTROMAGNETS; EVAPORATION; MAGNETRON SPUTTERING; PRESSURE CONTROL; SUBSTRATES; TRIBOLOGY; VAPOR DEPOSITION;

ARC EVAPORATION; DECORATIVE COATINGS; PHYSICAL VAPOR DEPOSITION (PVD);

COATING TECHNIQUES;

EID: 0031168074     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03148-9     Document Type: Article

References (6)

1. W.-D. Münz, D. Schulze and F.J.M. Hauzer, Surf. Coat. Technol., 50 (1992) 169.
2. W.D. Sproul, P.J. Rudnik, K.O. Legg, W.-D. Münz, I. Petrov and J.E. Greene, Surf. Coat. Technol., 56 (1993) 179.
3. L. Donohue, J. Cawley, D.B. Lewis, J.S. Brooks and W.-D. Münz, Surf. Coat. Technol., 76-77 (1995) 149.
4. T. Hurkmans, T. Trinh, D.B. Lewis, J.S. Brooks and W.-D. Münz, Surf. Coat. Technol., 76-77 (1995) 159.
5. L. Donohue, I. Smith, D.B. Lewis, W.-D. Münz, I. Petrov, J.E. Greene, T. Hurkmans and T. Trinh, Paper presented at ICMCTF 1996.
6. W.-D. Münz, K. Vannisselroy, R. Tietema, T. Hurkmans and G. Keiren, Surf. Coat. Technol., 58 (1993) 205.