An integrated silicon interferometric temperature sensor

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 267-272

  Cocorullo, G ^a,c   Della Corte, F G ^a   Iodice, M ^a,d   Rendina, I ^a   Sarro, P M ^b  

^a CNR   (Italy)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c UNIVERSITY OF CALABRIA   (Italy)

^d UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

Fabry P rot cavities; Integrated sensors; Interferometric sensors; Silicon; Temperature sensors

Indexed keywords

AMORPHOUS SILICON; FABRY-PEROT INTERFEROMETERS; MICROELECTRONIC PROCESSING; PLASMA ETCHING; SUBSTRATES;

INTEGRATED INTERFEROMETRIC TEMPERATURE SENSORS;

SENSORS;

EID: 0031167149     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80273-7     Document Type: Article

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