Fabrication of an integrated ΔE-E-silicon detector by wafer bonding using cobalt disilicide

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 391, Issue 2, 1997, Pages 315-328

  Thungström, Göran ^a,d   Van Veldhuizen, Elbert Jan ^b   Westerberg, Lars ^c   Norlin, Lars Olov ^d   Petersson, C Sture ^d  

^a MID SWEDEN UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c UPPSALA UNIVERSITY   (Sweden)

^d ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; COBALT COMPOUNDS; COMPUTER SIMULATION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON SENSORS; SILICON WAFERS;

COBALT DISILICIDE; SILICON DETECTORS; WAFER BONDING;

PARTICLE DETECTORS;

EID: 0031166654     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)00408-7     Document Type: Article

References (13)

1. K. Husimi, S. Ohkawa, C. Kim, S. Osada, F. Shiraishi, Nucl. Instr. and Meth. 196 (1982) 131.
2. Y. Kim, C. Kim, K. Husimi, S. Ohkawa, Y. Fuchi, S. Osada, Nucl. Instr. and Meth. 226 (1984) 125.
3. G. Cardella et al., Nucl. Instr. and Meth. A 378 (1996) 262.
4. G. Thungström, C. Fröjdh, P. Svedberg, C.S. Petersson, Phys. Scripta T 54 (1994) 77.
5. S. Selberherr, Analysis and Simulation of Semiconductor Devices, Springer, New York, 1984.
6. Canna Zaring, Ph.D. Thesis, Dopant diffusion in cobalt and nickel silicide-silicon system for ULSI-technology, TRITA-FTE Forskningsrapport 1993:2 Royal Institute of Technology, Department of Electronics, Solid State Electronics.
7. V. Probst, H. Schaber, A. Mitwalsky, H. Kabza, L. Van den Hove, K. Maex, J. Appl. Phys. 70(2) (1991) 708.
8. J.W. Carbett, J.C. Bowgoin, Point defects in solids, in: J.H. Crawford Jr., L.M. Slifkin (Eds.), Semiconductor and Molecular Crystals, vol. 2, Plenum Press, New York, p.1.
9. A. Bischoff, N. Findeis, D. Hauff, P. Holl, J. Kemmer, P. Klein, P. Lechner, G. Lutz, R.H. Richter, L. Struder, Nucl. Instr. and Meth. A 326 (1993) 27.
10. L. Evensen, A. Hanneborg, B. Sundby Avset, M. Nese, Proc. 6th Symp. on Semiconductor Detectors, Milano, 1992.
11. A. Longoni, M. Sampietro, L. Struder, Nucl. Instr. and Meth. A 288 (1990) 35.
12. D. Fox, R.T de Souza, S.L. Chen, B. Davin, T.M. Hamilton, Y. Lou, J. Dorsett, J. Ottarson, Nucl. Instr. and Meth. A 368 (1996) 709.
13. V.V. Avdeichikov, E.A. Ganza, O.V. Lozhkin, Nucl. Instr. and Meth. 131 (1975) 61.