Microhardness of sputter-deposited zirconia films on silicon wafers

Journal of the American Ceramic Society

Volumn 80, Issue 6, 1997, Pages 1477-1484

  Pakala, Mahendra ^a,b   Walls, Heather ^a,b   Lin, Ray Y ^a,b  

^a University of Cincinnati   (United States)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ETCHING; HARDNESS; MELTING; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SPUTTER DEPOSITION; SURFACE STRUCTURE; THERMAL EFFECTS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

CALCIA STABILIZED ZIRCONIA FILMS;

ZIRCONIA;

EID: 0031166384     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1997.tb03006.x     Document Type: Article

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