Temperature dependence of lead loss in r.f. magnetron sputtering of a stoichiometric Pb(Zr,Ti)O3 target

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 155-161

  Basit, Nasir Abdul ^a   Kim, Hong Koo ^a   Blachere, Jean ^a  

^a University of Pittsburgh   (United States)

Author keywords

Deposition process; Electrical properties and measurements; Sputtering; X ray diffraction

Indexed keywords

ANNEALING; COERCIVE FORCE; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC LOSSES; FERROELECTRICITY; HIGH TEMPERATURE EFFECTS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; REMANENCE; STOICHIOMETRY; THERMODYNAMIC STABILITY;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0031165626     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00004-7     Document Type: Article

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