A micromachined silicon magnetometer

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 339-341

  Ayela, F ^a   Fournier, T ^a   Chaussy, J ^a  

^a CNRS   (France)

Author keywords

Electrostatic force Q factors; Magnetic sensors; Silicon membranes

Indexed keywords

ELECTROSTATICS; MAGNETIC FIELD EFFECTS; MAGNETIC MOMENTS; MAGNETIZATION; MAGNETOMETERS; MICROMACHINING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

MAGNETIC SENSORS; SILICON MEMBRANES;

SENSORS;

EID: 0031165554     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80284-1     Document Type: Article

References (6)

1. W. Roos, K.A. Hempel, C. Voigt, H. Dederichs and R. Schipper, High sensitivity vibrating reed magnetometer, Rev. Sci. Instrum., 51 (1980) 612-613.
2. H. Zijlstra, A vibrating reed magnetometer for microscopic particles, Rev. Sci. Instrum., 41 (1970) 1241-1243.
3. P.J. Flanders, An alternating-gradient magnetometer, J. Appl. Phys., 63 (1988) 3940-3945.
4. P. Roth and E. Gmelin, A capacitance displacement sensor with elastic diaphragm, Rev. Sci. Instrum., 63 (1992) 2051-2053.
5. P.G. Dargie and S.T. Hughes, A thick-film capacitive differential pressure transducer, Meas. Sci. Technol., 5 (1994) 1216-1220.
6. J.C. Greenwood, Etched silicon vibrating sensor, J. Phys. E, 17 (1984) 650-652.