Fabrication of radiation entrance windows with optimized sub-100 eV transmission properties

Journal of X-Ray Science and Technology

Volumn 7, Issue 2, 1997, Pages 130-138

  Viitanen, V P ^a   Silanto, S ^a   Bavdaz, M ^b  

^a Oxford Instruments Analytical Oy   (Finland)

^b EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

RADIATION ENTRANCE WINDOWS; ULTRATHIN METAL MEMBRANES;

ALUMINUM; ETCHING; NIOBIUM; PHOTOLITHOGRAPHY; PHOTONS; POLYIMIDES; POLYMERIC MEMBRANES; SILICON; SUBSTRATES; ULTRATHIN FILMS;

METALLIC FILMS;

EID: 0031165364     PISSN: 08953996     EISSN: None     Source Type: Journal    
DOI: 10.1006/jxra.1997.0254     Document Type: Article

References (3)

1. M. Bavdaz, A. J. Peacock, R. Den Hartog, A. Poelaert, P. J. Underwood, V-P. Viitanen, and A. C. Wright in "EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VII" (O. H. W. Siegmund and M. A. Gummin, Eds.), p. 301, SPIE Vol. 2808, SPIE - Int. Soc. Opt. Eng., Bellingham, WA, 1996.
2. C. T. Chantier, J. Phys. Chem. Ref. Data 24, 71 (1995).
3. B. L. Henke, E. M. Gullikson, and J. C. Davis, Atom. Data Nucl. Data Tables 54, 181 (1993).