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Volumn 4, Issue 3, 1997, Pages 321-326
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The frequency response of a fractal photolithographic structure
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DIELECTRIC PROPERTIES;
ELECTRIC IMPEDANCE MEASUREMENT;
FRACTALS;
FREQUENCY RESPONSE;
MASKS;
PHOTOLITHOGRAPHY;
TREES (MATHEMATICS);
FRACTAL TREE PATTERNS;
DIELECTRIC MATERIALS;
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EID: 0031164618
PISSN: 10709878
EISSN: None
Source Type: Journal
DOI: 10.1109/94.598289 Document Type: Article |
Times cited : (35)
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References (9)
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