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Volumn 4, Issue 3, 1997, Pages 321-326

The frequency response of a fractal photolithographic structure

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC PROPERTIES; ELECTRIC IMPEDANCE MEASUREMENT; FRACTALS; FREQUENCY RESPONSE; MASKS; PHOTOLITHOGRAPHY; TREES (MATHEMATICS);

EID: 0031164618     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/94.598289     Document Type: Article
Times cited : (35)

References (9)
  • 1
    • 0002315855 scopus 로고
    • Fractal aspects of the dielectric response of charge carriers in disordered materials
    • G. A. Niklasson, "Fractal aspects of the dielectric response of charge carriers in disordered materials", J. Appl. Phys., Vol. 62 (7), pp. R1-14, 1987.
    • (1987) J. Appl. Phys. , vol.62 , Issue.7
    • Niklasson, G.A.1
  • 2
    • 0001461503 scopus 로고
    • Comparison of dielectric response functions for conducting materials
    • G. A. Niklasson, "Comparison of dielectric response functions for conducting materials", J. Appl. Phys., Vol. 66 (9), pp. 4350-4359, 1989.
    • (1989) J. Appl. Phys. , vol.66 , Issue.9 , pp. 4350-4359
    • Niklasson, G.A.1
  • 3
    • 0024736270 scopus 로고
    • Fractals and the ac conductivity of disordered materials
    • G. A. Niklasson, "Fractals and the ac conductivity of disordered materials", Physica D, Vol. 38, pp. 260-265, 1989.
    • (1989) Physica D , vol.38 , pp. 260-265
    • Niklasson, G.A.1
  • 4
    • 0000313108 scopus 로고
    • A fractal description of the dielectric response of disordered materials
    • G. A. Niklasson, "A fractal description of the dielectric response of disordered materials", J. Phys.: Condensed Matter, Vol. 5, pp. 4233-4242, 1993.
    • (1993) J. Phys.: Condensed Matter , vol.5 , pp. 4233-4242
    • Niklasson, G.A.1
  • 8
    • 4243367934 scopus 로고
    • Space-filling Constraint on Transport in Random Aggregates
    • T. A. Witten and J. Kantor, "Space-filling Constraint on Transport in Random Aggregates", Phys. Rev. B., Vol. 30, pp. 4093-4095, 1984.
    • (1984) Phys. Rev. B. , vol.30 , pp. 4093-4095
    • Witten, T.A.1    Kantor, J.2
  • 9
    • 0014800514 scopus 로고
    • Cleaning Solutions on Peroxide for Use on Silicon Semiconductor Tecnology
    • June
    • Werner Kern, David A. Puotinen, "Cleaning Solutions on Peroxide for Use on Silicon Semiconductor Tecnology", RCA Revieuw, pp. 187-206, June 1970.
    • (1970) RCA Revieuw , pp. 187-206
    • Kern, W.1    Puotinen, D.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.