Analysis of local lattice strains around plate-like oxygen precipitates in czochralski-silicon wafers by convergent-beam electron diffraction

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 6 A, 1997, Pages 3359-3365

  Okuyama, Tetsuya ^a   Nakayama, Masaru ^a   Sadamitsu, Shinsuke ^b   Nakashima, Jyun ^c   Tomokiyo, Yoshitsugu ^d  

^a KURUME NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b SUMCO CORPORATION   (Japan)

^c SHARP CORPORATION   (Japan)

^d KYUSHU UNIVERSITY   (Japan)

Author keywords

CBED; CBIM; Convergent beam electron diffraction; Convergent beam imaging; CZ Si; Defocused large angle CBED; Gettering; Higher order Laue zone (HOLZ) pattern; LACBED; Lattice strain; Oxygen precipitate

Indexed keywords

CONVERGENT BEAM ELECTRON DIFFRACTION; CONVERGENT BEAM IMAGING; CZOCHRALSKI SILICON; GETTERING; LATTICE STRAIN; LAUE ZONE PATTERN; OXYGEN PRECIPITATES;

CRYSTAL LATTICES; ELECTRON DIFFRACTION; OXYGEN; PRECIPITATION (CHEMICAL); STRAIN; STRESSES;

SILICON WAFERS;

EID: 0031164339     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3359     Document Type: Article

References (21)

1. T. Y. Tan, E. E. Gardner and W. K. Tice: Appl. Phys. Lett. 30 (1977) 175.
2. F. Shimura, H. Tsuya and T. Kawamura: J. Electrochem. Soc. 128 (1981) 1579.
3. M. Sano, M. Hourai, M. Miyazaki, X. Fujino and T. Shiraiwa: Jpn. J. Appl. Phys. 27 (1988) 1220.
4. M. Seibt and K. Graff: J. Appl. Phys. 63 (1988) 4444.
5. Z. Laczik, G.R. Booker and W. Bergholz: Appl. Phys. Lett. 55 (1989) 2625.
6. F. Shimura, H. Tsuya and T. Kawamura: J. Appl. Phys. 51 (1980) 269.
7. Y. Matsushita: J. Cryst. Growth 56 (1982) 516.
8. T. Y. Tan and W. K. Tice: Philos. Mag. 34 (1976) 615.
9. J. W. Steeds: Convergent Beam Electron Diffraction, eds. J.J. Hren, J. I. Goldstein and D. Joy (Plenum, New York, 1979) Introduction to Analytical Electron Microscopy, p. 387.
10. R. C. Ecob, M. P. Shaw, A. J. Porter and B. Ralph: Philos. Mag. A 44 (1981) 1117.
11. M. Tanaka, M. Terauchi and T. Kaneyama: Convergent-Beam Electron Diffraction II (JEOL-M, Tokyo, 1988) p. 226.
12. T. Okuyama, S. Matsumura, Y. Tomokiyo, N. Kuwano and K. Oki: ISIJ Int. (Trans. Iron Steel Inst. Japan) 29 (1989) 191.
13. Y. Tomokiyo, T. Okuyama, S. Matsumura, N. Kuwano and K. Oki: Mater. Trans. JIM 31 (1990) 641.
14. C. J. Humphreys, D. M. Maher, H. L. Fraser and D. J. Eaglesham: Philos. Mag. A 58 (1988) 787.
15. R. Høier: Acta Cryst. A 11 (1972) 597.
16. Y. Tomokiyo, S. Matsumura, X. Kuwano, M. Kominami, T. Okuyama and K. Oki: J. Electron Microsc. 35 (1986) 359.
17. T. Okuyama, S. Matsumura, N. Kuwano, K. Oki and Y. Tomokiyo: Ultramicroscopy 31 (1989) 309.
18. S. Matsumura, M. Toyohara and Y. Tomokiyo: Philos. Mag. A 62 (1990) 653.
19. C. Kittel: Introduction to Solid State Physics (John Wiley & Sons, New York, 1971) 4th ed., p. 133.
20. S. M. Hu: Appl. Phys. Lett. 31 (1977) 139.
21. K. Kimoto, K. Usami, H. Sakata and M. Tanaka: Jpn. J. Appl. Phys. 32 (1993) L211.