Reactive gas magnetron sputtering of lithium hydride and lithium fluoride thin films

Journal of X-Ray Science and Technology

Volumn 7, Issue 2, 1997, Pages 159-170

  Thompson, G B ^a   Allred, D D ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; FLUORESCENCE; HYDRIDES; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; MIRRORS; MORPHOLOGY; MULTILAYERS; SURFACE ROUGHNESS; THIN FILMS; ULTRAVIOLET SPECTROMETERS; X RAYS;

LITHIUM FLUORIDE; LITHIUM HYDRIDE; LITHIUM OXIDE; SOFT X RAYS;

OPTICAL FILMS;

EID: 0031163092     PISSN: 08953996     EISSN: None     Source Type: Journal    
DOI: 10.1006/jxra.1997.0258     Document Type: Article

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