Ion beam sputtering techniques for high-resolution concentration depth profiling with glancing-incidence X-ray fluorescence spectrometry

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 52, Issue 7, 1997, Pages 813-821

  Wiener, G ^a,b   Gunther R ^a   Michaelsen, C ^a   Knoth, J ^a   Schwenke, H ^a   Bormann, R ^a  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Depth profiling; Ion beam sputtering; Surface analysis; Thin layer; X ray fluorescence

Indexed keywords

ETCHING; FLUORESCENCE; ION BEAMS; SPUTTER DEPOSITION; SUBSTRATES;

GLANCING INCIDENCE X RAY FLUORESCENCE SPECTROMETRY (GIXRF); HIGH RESOLUTION CONCENTRATION DEPTH PROFILING; ION BEAM SPUTTERING; SURFACE ANALYSIS;

X RAY SPECTROSCOPY;

EID: 0031162524     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(96)01643-6     Document Type: Article

References (21)

1. P. Bertin, Principles and Practice of X-Ray Spectrometric Analysis, Plenum Press, New York, 1975.
2. Y. Yoneda, T. Horiuchi, Rev. Sci. Instrum., 42 (1971) 1069.
3. P. Eichinger, H.J. Rath, H. Schwenke, ASTM Spec. Tech. Publ., No. 305 (1989).
4. R. Klockenkämper, J. Knoth, A. Prange, H. Schwenke, Anal. Chem., 64 (1992) 1115.
5. P. Stössel, A. Prange, Anal. Chem., 57 (1985) 2880.
6. U. Weisbrod, R. Gutschke, J. Knoth, H. Schwenke, Appl. Phys., A 53 (1991) 449.
7. D.K.G. de Boer, Phys. Rev. B, 44 (1991) 498.
8. D.K.G. de Boer, A.J.G. Leenaers, W.W. van den Hoogenhof, Appl. Phys. A, 58 (1994) 169.
9. J. Knoth, R. Bormann, R. Gutschke, C. Michaelsen, H. Schwenke, Spectrochim. Acta Part B, 48 (1993) 185.
10. W.W. van den Hoogenhof, D.K.G. de Boer, Surf. Interface Anal., 22 (1994) 572.
11. H. Schwenke, J. Knoth, R. Günther, G. Wiener, C. Michaelsen, R. Bormann, Spectrochimica Acta Part B, in press.
12. G.K. Wehner, G.S. Anderson, in: L.J. Maissel and R. Glang (Eds.), Handbook of Thin Film Technology, McGraw-Hill, New York, 1983, Chapter 3.
13. G. Carter, and J.S. Collington, in: Ion Bombardment of Solids, Heinemann, London, Chapter 7.
14. I.H. Wilson, Surf. Topogr., 2 (1989) 289.
15. J.L. Vossen, J.J. Cuomo, in: J.L. Vossen and W. Kern (Eds.), Thin Film Processes, Academic Press, New York, 1978, Chapter 2.
16. G. Wiener, C. Michaelsen, J. Knoth, H. Schwenke, R. Bormann, Rev. Sci. Instrum., 66(1) (1995) 20.
17. R. Günther, G. Wiener, J. Knoth, H. Schwenke, R. Bormann, Rev. Sci. Instrum., 67(6) (1996) 2332.
18. A. Zalar, S. Hofmann, Nucl. Instr. Methods Sect. B, 18 (1987) 655.
19. H. Oechsner, Z. Phys., 261 (1973) 37.
20. Reprint of IUPAC document, Spectrochim. Acta, 33 (1978) 241.
21. Contract Analysis, Oberflächen- und Materialtechnologie GmbH (OMT), Lübeck, 1994.