Preparation of hexafluorodisilane

Journal of Fluorine Chemistry

Volumn 83, Issue 1, 1997, Pages 89-91

  Isomura, S ^a   Takeuchi, K ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Antimony trifluoride; Chlorine; Ferrosilicon; Fluorination; Hexachlorodisilane; Hexafluorodisilane; Purification; Synthesis

Indexed keywords

EID: 0031161594     PISSN: 00221139     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-1139(96)03560-9     Document Type: Article

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