Raman studies of diamond film growth on fuse-silica substrates by a multi-step process

Thin Solid Films

Volumn 301, Issue 1-2, 1997, Pages 126-133

  Lin, G L ^a   Lue, Juh Tzeng ^a   Chen, C L ^a   Lin, I N ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Deposition process; Diamond; Raman scattering; Scanning electron microscopy

Indexed keywords

FILM GROWTH; FUSED SILICA; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES;

FILM QUALITY; MULTISTEP DEPOSITION;

DIAMOND FILMS;

EID: 0031153590     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00051-5     Document Type: Article

References (18)

1. A.T. Collins and E.C. Lightowlers, in by J.E. Field (ed.), The Properties of Diamond, Academic Press, London, 1979, p. 79.
2. A.T. Collins, Semicond. Sci. Technol., 55 (1989) 505.
3. S.D. Wolter, B.R. Stoner and J.T. Glass, Appl. Phys. Lett., 62 (1993) 1215.
4. W. Zhu, F.R. Sivazlian, B.R. Stoner and J.T. Glass, J. Mater. Res., 10 (1995) 425.
5. S. Barrat, P. Pigeat, I. dieguez, E. Bauer-Gresse and B. Weber, Thin Solid Films, 263 (1995) 127.
6. C. Findeling-Dufour, A. Vignes and A. Gicquel, Diamond Relat. Mater., 4 (1995) 429.
7. D.C. Fagram, Mater. Sci. Forum, 52 (1989) 475.
8. P.J. Ellis, D.S. Buhaenks and B.R. Stoner, Diamond Relat. Mater., 4 (1995) 406.
9. T. Inoure, H. Tachibana, K. Kumagai, K. Miyata, K. Nishimura, H. Kobashi and A. Nakave, J. Appl. Phys., 67 (1990) 7329.
10. E.J. Bienk and S.S. Eskildsen, Diamond Relat. Mater., 2 (1993) 432.
11. M. Liu, D.S. Dandy, Diamond Relat. Mater., 4 (1995) 1173.
12. B.E. William and J.T. Glass, J. Mater. Res., 4 (1989) 373.
13. S. Yugo, T. Kimura and T. Muto, Appl. Phys. Lett., 58 (1991) 1036.
14. B.R. Stoner, G.H. Ma, S.D. Wolter and J.T. Glass, Phys. Rev., B45 (1992) 11067.
15. S.D. Wolter, B.R. Stoner, J.T. Glass, P.J. Ellis, D.S. Buhaenko, C.E. Jenkins and P. Southwork, Appl. Phys. Lett., 62 (1993) 1215.
16. D.K. Milne, P.G. Roberts, P. John, M.G. Jubber, M. Liehol and J.I.B. Wilson, Diamond Relat. Mater., 4 (1995) 394.
17. X. Jiang and C.P. Klages, Diamond Relat. Mater., 2 (1993) 112.
18. C.L. Chen and J.T. Lue, J. Non-Cryst. Solids, 194 (1996) 93.