Study on estimation of metal film thickness by attenuated total reflection

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 5 SUPPL. B, 1997, Pages 3162-3166

  Tokunaga, Yoshiaki ^a   Watanabe, Hirofumi ^a   Minamide, Akiyuki ^b   Minamikawa, Toshiharu ^c  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b KANAZAWA TECHNICAL COLLEGE   (Japan)

^c INDUSTRIAL RESEARCH INSTITUTE OF ISHIKAWA   (Japan)

Author keywords

Ag; ATR; Au; Cu; Fresnel's formula; Kretschmann configuration; Least square fit; Otto configuration; Prism; Surface plasmon; Thin film thickness

Indexed keywords

ATTENUATED TOTAL REFLECTION (ATR); FRESNEL'S FORMULA; KRETSCHMANN CONFIGURATION; OTTO CONFIGURATION;

ACOUSTIC WAVE REFLECTION; CURVE FITTING; ESTIMATION; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; THIN FILMS;

METALLIC FILMS;

EID: 0031147498     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3162     Document Type: Article

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