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Physica B: Condensed Matter

Volumn 233, Issue 2-3, 1997, Pages 130-133

A necessary modification for groove tracking method

(1) Chou, Chien Heng a

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

Author keywords

Fitting; Groove tracking

Indexed keywords

CONTOUR MEASUREMENT; ELECTROMAGNETIC WAVE REFLECTION; SURFACE TREATMENT;

GROOVE TRACKING;

CRYSTAL DEFECTS;

EID: 0031146941 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4526(96)01034-4 Document Type: Article

Times cited : (7)

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