Scattering by layered structures with rough surfaces: Comparison of polarimetric optical scatterometer measurements with theory

Applied Optics

Volumn 36, Issue 13, 1997, Pages 2956-2962

  Bahar, Ezekiel ^a   Kubik, Robert D ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b MOTOROLA INC   (United States)

Author keywords

Mueller matrix; Optical detection; Rough surfaces; Scatterometer measurements; Stratified media

Indexed keywords

CALCULATIONS; GLASS; LIGHT REFLECTION; LIGHT TRANSMISSION; MATHEMATICAL MODELS; MATRIX ALGEBRA; OPTICAL DEVICES; OPTICAL VARIABLES MEASUREMENT; SILICON WAFERS; SURFACE ROUGHNESS;

LAYERED STRUCTURE; MUELLER MATRIX ELEMENTS; OPTICAL DETECTION; SCATTEROMETER MEASUREMENTS; STRATIFIED MEDIA;

LIGHT SCATTERING;

EID: 0031146901     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002956     Document Type: Article

References (15)

1. E. Bahar and R. D. Kubik, “Measurements from polarimetric optical bistatic scatterometer, ” in Conference Proceedings of the Combined Optical-Microwave Earth and Atmosphere Sensing (IEEE Service Center, Piscataway, N.J., 1993), pp. 173-176.
2. E. Bahar and Y. Zhang, “Measurements of the Mueller matrix elements using a fully polarimetric optical scatterometer, ” in Conference Proceedings of the Combined Optical-Microwave Earth and Atmosphere Sensing (IEEE Service Center, Piscataway, N.J., 1995), pp. 208-210.
3. R. D. Kubik, “Scattering and depolarization upon transmission across and multiple reflections from irregular multi-layered structures, ” Ph.D. dissertation (University of Nebraska-Lincoln, Lincoln, Neb., 1993).
4. E. Bahar and B. S. Lee, “Full wave solutions for rough surface bistatic radar cross sections—comparison with small perturbation, physical optics solutions numerical and experimental results, ” Radio Sci. 29, 407-429 (1994).
5. E. Bahar and R. D. Kubik, “Computations of the Mueller matrix elements for scattering from layered structures with rough surfaces, with applications to optical detection, ” Appl. Opt. 36, 1-9 (1997).
6. M. I. Sancer, “Shadow corrected electromagnetic scattering from a randomly rough surface, ” IEEE Trans. Antennas Propag. AP-17, 577-585 (1968).
7. E. Bahar and M. A. Fitzwater, “Shadowing by non-Gaussian rough surfaces for which decorrelation implies statistical independence, ” Radio Sci. 18, 566-572 (1983).
8. E. D. Palik, ed., Handbook of Optical Constants of Solids, Vol. 1 (Academic, Orlando, Fla., 1985).
9. F. E. Nicodemus, “Reflectance nomenclature and directional reflectance and emmissivity, ” Appl. Opt. 9, 1747-1475 (1970).
10. J. C. Stover, Optical Scattering: Measurement and Analysis (McGraw-Hill, New York, 1990).
11. P. Beckman, Orthogonal Polynomials for Engineers and Physicists (Golem, Boulder, Colo., 1973).
12. E. Bahar and Y. F. Lee, “Scattering cross sections of non-Gaussian rough surfaces: unified full wave approach, ” IEEE Trans. Antennas Propag. 39, 1777-1781 (1991).
13. S. M. Haugland, E. Bahar, and A. H. Carrieri, “Polarized IR scattering used to identify contaminant coatings over rough surfaces, ” in Proceedings of the 1991 Scientific Conference on Obscuration and Aerosol Research (Chemical Research, Development and Engineering Center, U.S. Army Armament, Munitions and Chemical Command, Aberdeen Proving Ground, Md., 1992), pp. 143-155.
14. E. Bahar and M. A. Fitzwater, “Full wave physical models of nonspecular scattering in irregular stratified media, ” IEEE Trans. Antennas Propag. 37, 1609-1615 (1989).
15. E. Bahar and J. R. Wait, “Propagation in a model terrestrial waveguide of nonuniform height, theory and experiment, ” Radio Sci. J. Res. 69D, 1445-1463 (1965).