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Volumn 380, Issue 2-3, 1997, Pages 245-257
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X-ray reflectivity study on gold films during sputter deposition
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Author keywords
Atomic force microscopy; Gold; Growth; Metallic films; Metallic surfaces; Models of non equilibrium phenomena; Non equilibrium thermodynamics and statistical mechanics; Polycrystalline surfaces; Polycrystalline thin films; Scanning tunneling microscopy
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Indexed keywords
APPROXIMATION THEORY;
ATOMIC FORCE MICROSCOPY;
FILM GROWTH;
MATHEMATICAL MODELS;
METALLIC FILMS;
MORPHOLOGY;
SCANNING TUNNELING MICROSCOPY;
SILICON;
SPUTTER DEPOSITION;
STATISTICAL MECHANICS;
SURFACE ROUGHNESS;
THERMODYNAMICS;
NON EQUILIBRIUM THERMODYNAMICS;
X RAY REFLECTIVITY MEASUREMENTS;
GOLD;
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EID: 0031146482
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(96)01406-9 Document Type: Article |
Times cited : (9)
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References (35)
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