Indium tin oxide transparent electrodes for broad-area top-emitting vertical-cavity lasers fabricated using a single lithography step

IEEE Photonics Technology Letters

Volumn 9, Issue 5, 1997, Pages 551-553

  Chua, C L ^a   Thornton, R L ^a   Treat, D W ^a   Yang, V K ^a   Dunnrowicz, C C ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

Contacts; Electrode; Indium tin oxide; Oxide aperture; Semiconductor lasers; Surface emitting lasers

Indexed keywords

CURRENT DENSITY; ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTRODES; LIGHT EMISSION; LITHOGRAPHY; OPTICAL PUMPING; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE;

INDIUM TIN OXIDE (ITO) FILMS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

SEMICONDUCTOR LASERS;

EID: 0031146367     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.588090     Document Type: Article

References (5)

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