Novel miniature integrated optical goniometers

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 23-28

  Kunz, Rino E ^a,b   Dübendorfer, Jürg ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Angle measurement; Industrial measurement and testing; Integrated optical sensors; Metrology; Miniature goniometer modules

Indexed keywords

ANGLE MEASUREMENT; INTEGRATED OPTICS; LIGHT; MINIATURE INSTRUMENTS; OPTICAL SENSORS;

INTEGRATED OPTICAL SENSORS; MINIATURE GONIOMETER MODULES;

GONIOMETERS;

EID: 0031145739     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01413-6     Document Type: Article

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