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Volumn 20, Issue 3, 1997, Pages 335-341

The apllication of v-groove slot-array method to the piezoresistive pressure sensors

Author keywords

Piezoresistive; Pressure sensor; V groove

Indexed keywords

COMPUTER SOFTWARE; FINITE ELEMENT METHOD; MICROPROCESSOR CHIPS; STRESSES;

EID: 0031145118     PISSN: 02533839     EISSN: 21587299     Source Type: Journal    
DOI: 10.1080/02533839.1997.9741837     Document Type: Article
Times cited : (2)

References (8)
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  • 2
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    • Jackson, T.N.1    Tischler, M.A.2    Wise, K.D.3
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    • Feb
    • O'Connor, L., 1992. “MEMS-Microeletromechanical System”. Mechanical Engineering,:4047 Feb
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    • O'Connor, L.1
  • 7
    • 85023915473 scopus 로고
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    • Sze, S.M.1
  • 8
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    • New Pressure Sensor with Inner-compensation for Non-linearity and Protection to Over-pressure
    • Wu, X. P., 1990. “New Pressure Sensor with Inner-compensation for Non-linearity and Protection to Over-pressure”. Sensors and Actuators, A21-A23:65–69.
    • (1990) Sensors and Actuators , vol.A21-A23 , pp. 65-69
    • Wu, X.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.