Property evaluation of vapor deposited TiN film by the analysis of elastic waves (2nd Report, Film strength estimated by AE source inversion during compressive loading)

Nippon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A

Volumn 63, Issue 609, 1997, Pages 1057-1062

  Ogawa, Singo ^a   Cho, Hideo ^a   Yamanaka, Kazushi ^a   Takemoto, Mikio ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSION TESTING; AMORPHOUS FILMS; COMPRESSION TESTING; ELASTIC MODULI; STAINLESS STEEL; STRAIN; STRENGTH OF MATERIALS; STRUCTURAL LOADS; VAPOR DEPOSITION;

PLASMA VAPOR DEPOSITION; STAINLESS STEEL SUS317J2;

TITANIUM NITRIDE;

EID: 0031145005     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.63.1057     Document Type: Article

References (10)