A new detector for hydrogen analysis with a nuclear microprobe

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 124, Issue 4, 1997, Pages 639-645

  Sjoland K A ^a   Kristiansson, P ^a   Elfman, M ^a   Malmqvist, K G ^a   Pallon, J ^a   Utui, R J ^a   Yang, C ^a  

^a LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

H(p,p)H; Hydrogen analysis; NRA; Nuclear Microprobe; Silicon surface barrier detectors; STIM

Indexed keywords

ELECTRON SCATTERING; ION BEAMS; ISOTOPES; MICROSCOPIC EXAMINATION; PROBES; PROTONS; SILICON; SILICON SENSORS; SURFACE MEASUREMENT; THREE DIMENSIONAL;

COINCIDENCE TECHNIQUE; DEPTH PROFILING; MINIMUM DETECTION LIMIT; NUCLEAR MICROPROBES; NUCLEAR REACTION ANALYSIS; SILICON SURFACE BARRIER DETECTORS;

HYDROGEN;

EID: 0031144213     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00116-X     Document Type: Article

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